Capacitive edge sensor design for SELENE segmented primary mirror

Linda M. Miller

doi:10.1117/12.174176

1 May 1994 Capacitive edge sensor design for SELENE segmented primary mirror

Linda M. Miller

Proceedings Volume 2121, Laser Power Beaming; (1994) https://doi.org/10.1117/12.174176
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

ECTIVE The objective of this project is to produce a proof-of-concept demonstration of an edge sen sor for the Space Laser Energy (SELENE) program. The operational specifications are: im full range in the z 10 nm resolution in z 100 jim 5p.mgap width between segments sign information 30 kHz bandwidth where z is the direction normal to the reflective surface of the mirror segment. Fabrication cost constraints also require that the edge sensor is affordable, easy to align, and integrable with seg ment materials. The small dimension of each hexagonal segment (3 cm from flat to flat, 1 cm thick) also requires that the sensor is small.

Citation Download Citation

Linda M. Miller "Capacitive edge sensor design for SELENE segmented primary mirror", Proc. SPIE 2121, Laser Power Beaming, (1 May 1994); https://doi.org/10.1117/12.174176

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