Translator Disclaimer
17 June 1994 Optical diagnostics of diamond CVD plasmas
Author Affiliations +
Abstract
Chemical vapor deposition of diamond occurs in a dynamic reacting environment which is far from chemical equilibrium. Real time, in situ, non intrusive diagnostics of the reacting gas mixture are needed to develop and test models of the chemical mechanism of diamond growth. We demonstrate the use of laser- induced fluorescence to probe the rotational state distribution in diamond depositing dc-arc-jet plasma to infer the gas temperature which is required to model the chemistry. Compensation for collision dynamics of the laser-excited state plays an important role in the determination of accurate and precise gas temperatures.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jay B. Jeffries, George A. Raiche, and Michael S. Brown "Optical diagnostics of diamond CVD plasmas", Proc. SPIE 2124, Laser Techniques for State-Selected and State-to-State Chemistry II, (17 June 1994); https://doi.org/10.1117/12.178101
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
Back to Top