11 May 1994 Pyrolysis of novel and safe phosphorous sources for chemical-beam epitaxy applications
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Proceedings Volume 2140, Epitaxial Growth Processes; (1994) https://doi.org/10.1117/12.175792
Event: OE/LASE '94, 1994, Los Angeles, CA, United States
It is well known that PH3 is highly toxic and safer alternatives need to be found. TBP has a favorable vapor pressure at room temperature and decomposes at a lower temperature than PH3. Results of a systematic investigation of the pyrolysis of novel phosphorous (P) precursors for chemical beam epitaxy (CBE) that are safer than phosphine are presented. In particular, three topics pertinent to CBE are presented: (1) technical details on the pyrolysis conditions and growth using several novel condensed-phase P-precursors, including tertiarybutylphosphine (TBP); (2) a custom-designed gas-source group V cracker cell; and (3) methods to reduce the cracking temperature of P-containing sources.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. W. Hill, C. W. Hill, Laurence P. Sadwick, Laurence P. Sadwick, C. W. Kim, C. W. Kim, H. H. Ryu, H. H. Ryu, Gerald B. Stringfellow, Gerald B. Stringfellow, } "Pyrolysis of novel and safe phosphorous sources for chemical-beam epitaxy applications", Proc. SPIE 2140, Epitaxial Growth Processes, (11 May 1994); doi: 10.1117/12.175792; https://doi.org/10.1117/12.175792

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