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2 June 1994 Design and fabrication of a compact wavelength demultiplexer integrated with fast MSM detector suitable for optoelectronic integrated circuits
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Abstract
In this paper, we report on the design and fabrication of a wavelength demultiplexer integrated with photodetector array in InGaAs/AlGaAs/GaAs structure. The demultiplexer is based on the Rowland circle grating. InGaAs MSM detectors grown on the top of an GaAs/AlGaAs waveguide structure are used for light detection. Only one step epitaxial growth is used. The cross-talk between adjacent channels measured from the detectors response is about -11 dB. The device can provide 38 output channels operating in the 1-micrometers wavelength region. The structure has the potential to be integrated with GaAs transistors without any complication in the fabrication.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mahmoud Fallahi "Design and fabrication of a compact wavelength demultiplexer integrated with fast MSM detector suitable for optoelectronic integrated circuits", Proc. SPIE 2145, Nonlinear Optics for High-Speed Electronics and Optical Frequency Conversion, (2 June 1994); https://doi.org/10.1117/12.177163
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