2 June 1994 Commercial manufacturing of vertical-cavity surface-emitting laser arrays
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Abstract
Optoelectronic integrated circuits based on arrays of vertical- cavity surface emitting lasers (VCSELs) are evolving into functional chips enhancing the performance of fiber optic networks, optical data storage, laser printing and scanning, visual displays, and optoelectronic computing and other systems. This evolution involves the development of advanced manufacturing technology germane to packaged arrays of VCSELs comprising micro- optic lens arrays and interface electronics. In this paper we describe Photonics Research's LASE-ARRAY commercial manufacturing efforts. Specifically we will discuss commercial manufacturing advancements in molecular beam epitaxial growth, full-wafer processing, interface electronics, microoptic lens arrays, packaging and implementation of statistical process control. Yield and reliability will also be discussed. Last we discuss emerging applications for the LASE-ARRAY technology.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stan E. Swirhun, Robert P. Bryan, Winston S. Fu, William E. Quinn, Jack L. Jewell, Greg R. Olbright, "Commercial manufacturing of vertical-cavity surface-emitting laser arrays", Proc. SPIE 2147, Vertical-Cavity Surface-Emitting Laser Arrays, (2 June 1994); doi: 10.1117/12.177203; https://doi.org/10.1117/12.177203
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