1 June 1994 Wafer scale testing of vertical cavity surface-emitting laser arrays
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Abstract
We have applied automated wafer scale testing methods to the characterization of arrays of vertical cavity surface emitting semiconductor lasers. The hardware and software for recording light versus current, current versus voltage, optical spectra, and high speed modulation performance are described.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thaddeus G. Dziura, S. C. Wang, "Wafer scale testing of vertical cavity surface-emitting laser arrays", Proc. SPIE 2148, Laser Diode Technology and Applications VI, (1 June 1994); doi: 10.1117/12.176642; https://doi.org/10.1117/12.176642
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