2 May 1994 Optical and electro-optical properties of H:LiTaO3 waveguides
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Abstract
A systematic study of the optical parameters and electrooptical coefficient r33 of optical waveguides fabricated by proton exchanged in LiTaO3 substrates has been carried out. Results of direct measurements of the electrooptical coefficient r33 on both as fabricated and annealed planar waveguides are presented. The samples have been annealed in the 265 - 420 degree(s)C range at different cooling rate. It has been found that quick (20 degree(s)C/min) cooling rate leads to different values of refractive index change and r33 coefficient in the exchanged layers than the slow one (1 - 2 degree(s)C/min).
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Ivanka T. Savatinova, Svetlen H. Tonchev, T. Popov, Mario Nicola Armenise, E. Liarokapis, "Optical and electro-optical properties of H:LiTaO3 waveguides", Proc. SPIE 2150, Design, Simulation, and Fabrication of Optoelectronic Devices and Circuits, (2 May 1994); doi: 10.1117/12.175000; https://doi.org/10.1117/12.175000
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