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17 June 1994 Planar waveguide diffractive beamsplitter for three-dimensional integrated optics
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The planar waveguide device transforming the monochromatic light beam to the array of uniform intensity parallel light beams emitted into free space has been demonstrated. This beamsplitter can be used to design three-dimensional integrated optical circuits and also it may be one of the elements of the optical processor with a variable logic structure. A set of these beamsplitters combined with the semiconductor laser array can be used to make the light beam matrix source. In our work the planar optical waveguides fabricated by Ag-ions diffusion into glass substrate were used. The beamsplitter input and output elements formed in As2S3 layers on the waveguide surface constitute the thin relief diffraction gratings with the asymmetrical groove profiles. The fabrication of the gratings consists of interference and selective etching techniques. The case of slight interaction of the waveguide mode with the output gratings was realized. The samples providing 16 and more output light beams with good uniform intensity were produced. The measured uniformity error was found to be +/- 5%. The fabrication of the high efficiency beamsplitter is also discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nikolai N. Kamenev and Valeriy I. Nalivaiko "Planar waveguide diffractive beamsplitter for three-dimensional integrated optics", Proc. SPIE 2152, Diffractive and Holographic Optics Technology, (17 June 1994);

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