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2 May 1994 Photodefinable benzocyclobutene as an optical waveguide material
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Proceedings Volume 2153, Optoelectronic Interconnects II; (1994) https://doi.org/10.1117/12.174508
Event: OE/LASE '94, 1994, Los Angeles, CA, United States
Abstract
Optical channel waveguides with single-mode dimensions have been fabricated using a photodefinable polymer system based on the benzocyclobutene resin and a bisarylazide photo- crosslinking agent. This photo-polymer offers a simple technique for fabricating optical interconnects in multi-chip modules. The processing conditions and developer selection required for the fabrication of benzocyclobutene optical waveguides is presented. With the losses in the waveguide typically less than 1 dB/cm, this material system is suitable for use in a variety of optical interconnect problems.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Casey F. Kane and Robert R. Krchnavek "Photodefinable benzocyclobutene as an optical waveguide material", Proc. SPIE 2153, Optoelectronic Interconnects II, (2 May 1994); https://doi.org/10.1117/12.174508
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