4 January 1994 Microwave properties of monolithic Y-Ba-Cu-O transmission line devices fabricated by the laser-writing patterning technique
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Abstract
We report on the microwave characteristics of coplanar strip transmission line devices fabricated in epitaxial YBaCuO thin films deposited on LaAlO3 substrates using the novel laser-writing patterning technique. This technique uses laser heating to selectively anneal regions of an oxygen depleted YBaCuO thin film to form local superconducting phases. In this manner, superconductive coplanar strip transmission line structures surrounded by the semiconducting YBaCuO phase were patterned with no photomasks, surface contamination or edge degradation.
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W. N. Maung, W. N. Maung, Donald P. Butler, Donald P. Butler, W. Xiong, W. Xiong, Witold Kula, Witold Kula, Roman Sobolewski, Roman Sobolewski, } "Microwave properties of monolithic Y-Ba-Cu-O transmission line devices fabricated by the laser-writing patterning technique", Proc. SPIE 2156, High Tc Microwave Superconductors and Applications, (4 January 1994); doi: 10.1117/12.166154; https://doi.org/10.1117/12.166154
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