Epitaxial multilayer thin films of SrCuO2/(Sr,Ca)CuO2 and (Sr,Ca)CuO2/(Sr,Ca)RuO3 have been prepared on (100) SrTiO3 single crystal by a multitarget RF magnetron sputtering. The XRD measurements revealed that the heteroepitaxial growth of c-plane of the infinite-layer SrCuO2 or a-plane of perovskite (Sr,Ca)RuO3 was confirmed with c-plane of infinite-layer (Sr,Ca)CuO2 on (100) SrTiO3 substrate surface. Both multilayer films were successfully constructed as we designed with a minimum layer thickness of 10 angstroms. In the TEM images of the SrCuO2/(Sr,Ca)CuO2 multilayer, there existed planar dislocations being parallel to the ac- and bc-planes, crossing the boundaries of SrCuO2 and (Sr,Ca)CuO2 layers. On the other hand, TEM measurements of the (Sr,Ca)CuO2/(Sr,Ca)RuO3 multilayers indicated that there was no dislocation which exists commonly in the infinite-layer films. Resistivities of multilayer films at room temperature were ranging from 1 to 100 m(Omega) cm and showed semiconductor-like dependence against the temperature.