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10 August 1994 Microanalytical study of defect formation in thin bismuth strontium calcium copper oxide films
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Thin bismuth strontium calcium copper oxide (BSCCO) films and BSCCO/insulator/BSCCO trilayers have been prepared on SrTiO3 and MgO substrates by evaporation from elemental sources in ozone atmosphere. Accurate control of the stoichiometry is achieved through monitoring of the atomic fluxes by use of in situ atomic absorption spectroscopy, as well as by reflection high-energy electron diffraction. Nevertheless, nanometer-scale second- phase precipitates are sometimes observed. These defects and the flat regions around them have been probed by a variety of microanalytical techniques, including Rutherford backscattering spectroscopy, particle-induced x-ray emission, atomic force microscopy, microscopic secondary ion mass spectroscopy and transmission electron microscopy.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard H. Howell, Alison Chaiken, Ronald G. Musket, Mark A. Wall, Mehdi Balooch, D. Phinney, Michael J. Fluss, J. N. Eckstein, Ivan Bozovic, and Gary F. Virshup "Microanalytical study of defect formation in thin bismuth strontium calcium copper oxide films", Proc. SPIE 2158, Oxide Superconductor Physics and Nano-Engineering, (10 August 1994);

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