High-Tc superconducting antenna-coupled microbolometer on silicon

Joseph P. Rice; Erich N. Grossman; L. J. Borcherdt; D. A. Rudman

doi:10.1117/12.176135

20 May 1994 High-T_c superconducting antenna-coupled microbolometer on silicon

Joseph P. Rice, Erich N. Grossman, L. J. Borcherdt, D. A. Rudman

Proceedings Volume 2159, High-Temperature Superconducting Detectors: Bolometric and Nonbolometric; (1994) https://doi.org/10.1117/12.176135
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

A process is described for fabricating antenna-coupled resistive-edge microbolometers based on the high-T_c superconductor YBa₂Cu₃O₇ (YBCO) on silicon. The YBCO and a buffer layer of yttria-stabilized zirconia (YSZ) were grown epitaxially on silicon to minimize excess electrical noise. A silicon-micromachined YBCO/YSZ air-bridge was incorporated to minimize the thermal conductance and the heat capacity. The thermal conductance of the air-bridge was measured to be 3 X 10^-6 W/K at a temperature of 100 K. At an operating temperature of 89 K, the detector is estimated to have a response time of 2 microsecond(s) , a responsivity of the 1000 V/W range, and a noise-equivalent power in the 10^-12 W/Hz^1/2 range at 1000 Hz.

Citation Download Citation

Joseph P. Rice, Erich N. Grossman, L. J. Borcherdt, and D. A. Rudman "High-T_c superconducting antenna-coupled microbolometer on silicon", Proc. SPIE 2159, High-Temperature Superconducting Detectors: Bolometric and Nonbolometric, (20 May 1994); https://doi.org/10.1117/12.176135

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