20 May 1994 Processing of high-Tc superconducting antenna microbolometers
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Abstract
Dry and wet photolithography has been used to define metal elements with YBCO thin film microbolometers. I-NaI concentrated solution was found suitable to etch gold layouts on the top of YBCO layer without noticeable reaction. The wet and dry processes were found to give comparable devices performances, while the wet process is easier to reproduce.
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Sergei A. Zhgoon, Sergei A. Zhgoon, Valery Georgievic Yakunin, Valery Georgievic Yakunin, Vladimir A. Ananchenko, Vladimir A. Ananchenko, Jacques Joffrin, Jacques Joffrin, Jean-Yves Prieur, Jean-Yves Prieur, } "Processing of high-Tc superconducting antenna microbolometers", Proc. SPIE 2159, High-Temperature Superconducting Detectors: Bolometric and Nonbolometric, (20 May 1994); doi: 10.1117/12.176144; https://doi.org/10.1117/12.176144
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