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20 May 1994 Transition edge YBa2Cu3O7-x microbolometers for infrared staring arrays
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High-temperature superconducting staring arrays are potentially important for both space and terrestrial applications which require the combination of high sensitivity over a broad wavelength range and relatively high temperature operation. In many such array applications sensitivity is more important than speed of response. Thus, it is desirable to design low- thermal-mass pixels that are thermally isolated from the substrate. To this end, Johnson, et al. at Honeywell have fabricated meander lines of YBa2Cu3O7-x (YBCO) sandwiched between layers of silicon nitride on silicon substrates. The silicon was etched out from under each YBCO meander line to form low-thermal-mass, thermally isolated microbolometers. These 125 micrometers X 125 micrometers devices are estimated to have a noise equivalent power of 1.1 X 10-12 W/Hz1/2 near 5 Hz with a 5 (mu) A bias (neglecting contact noise). A drawback of this original Honeywell design is that the YBCO is grown on an amorphous silicon nitride underlayer, which precludes the possibility of epitaxial YBCO growth. The YBCO therefore has a broad resistive transition, which limits the bolometer response, and the grain boundaries lead to excess noise. We discuss the potential performance improvement that could be achieved by using epitaxial YBCO films grown on epitaxial yttria-stabilized zirconia buffer layers on silicon. This analysis shows a significant signal to noise improvement at all frequencies in devices incorporating epitaxial YBCO films. Progress toward fabricating such devices is discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marc C. Foote, Burgess R. Johnson, and Brian D. Hunt "Transition edge YBa2Cu3O7-x microbolometers for infrared staring arrays", Proc. SPIE 2159, High-Temperature Superconducting Detectors: Bolometric and Nonbolometric, (20 May 1994);


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