2 July 1994 Multilayer buffer system for fabrication of high-Tc edge-geometry superconductor/normal-metal superconductor (SNS) weak links on silicon-on-sapphire substrates
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Proceedings Volume 2160, Superconductive Devices and Circuits; (1994) https://doi.org/10.1117/12.180986
Event: OE/LASE '94, 1994, Los Angeles, CA, United States
Abstract
High frequency detector and circuit applications often require device fabrication on medium-to-low dielectric constant substrates ((epsilon) < 12). Silicon-on-sapphire (SOS) substrates have acceptably low dielectric constants and provide other important advantages, including the possibility of monolithic integration of silicon and superconducting circuitry. Our initial results with YBa2Cu3O7-x(YBCO) edge- geometry superconductor/normal-metal/superconductor (SNS) weak links fabricated on r-plane SOS substrates using cubic zirconia (YSZ) buffer layers revealed problems with grain boundary nucleation in the YBCO counterelectrode. These results motivated development of a new multilayer buffer system consisting of an epitaxial YSZ film grown on an SOS substrate, overlaid by a thin YBCO 'seed' layer, and an epitaxial SrTiO3 (STO) layer. STO - YBCO bilayers grown over the YBCO seed layer show a remarkable improvement in epitaxial quality and in YBCO electrical properties relative to similar bilayers grown directly on the YSZ buffer. In addition, SNS weak links fabricated on SOS substrates using the multilayer buffer system exhibit dramatically improved electrical characteristics compared to devices produced on YSZ buffer layers. These are the first epitaxial edge-geometry SNS weak links produced on SOS substrates.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Brian D. Hunt, Brian D. Hunt, Marc C. Foote, Marc C. Foote, W. T. Pike, W. T. Pike, Jeff B. Barner, Jeff B. Barner, Richard P. Vasquez, Richard P. Vasquez, } "Multilayer buffer system for fabrication of high-Tc edge-geometry superconductor/normal-metal superconductor (SNS) weak links on silicon-on-sapphire substrates", Proc. SPIE 2160, Superconductive Devices and Circuits, (2 July 1994); doi: 10.1117/12.180986; https://doi.org/10.1117/12.180986
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