Pattern projection by conventional or diffractive optics: a comparison

Christiaan H. F. Velzel; Frank Wyrowski

doi:10.1117/12.190211

12 October 1994 Pattern projection by conventional or diffractive optics: a comparison

Christiaan H. F. Velzel, Frank Wyrowski

Proceedings Volume 2169, Nonconventional Optical Imaging Elements; (1994) https://doi.org/10.1117/12.190211
Event: International Colloquium on Nonconventional Optical Imaging Elements, 1993, Rydzyna-Rokosowo, Poland

Abstract

Pattern projection is an important application area of diffractive optics, comprising microlithography and laser materials processing. We discuss differences in performance and requirements between pattern projection with conventional imaging optics and with diffractive optics.

Citation Download Citation

Christiaan H. F. Velzel and Frank Wyrowski "Pattern projection by conventional or diffractive optics: a comparison", Proc. SPIE 2169, Nonconventional Optical Imaging Elements, (12 October 1994); https://doi.org/10.1117/12.190211

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