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12 October 1994 Pattern projection by conventional or diffractive optics: a comparison
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Proceedings Volume 2169, Nonconventional Optical Imaging Elements; (1994) https://doi.org/10.1117/12.190211
Event: International Colloquium on Nonconventional Optical Imaging Elements, 1993, Rydzyna-Rokosowo, Poland
Abstract
Pattern projection is an important application area of diffractive optics, comprising microlithography and laser materials processing. We discuss differences in performance and requirements between pattern projection with conventional imaging optics and with diffractive optics.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christiaan H. F. Velzel and Frank Wyrowski "Pattern projection by conventional or diffractive optics: a comparison", Proc. SPIE 2169, Nonconventional Optical Imaging Elements, (12 October 1994); https://doi.org/10.1117/12.190211
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