3D images used in the localization of the defects in semiconductor devices

George A. Stanciu; Catalin Miu; Sergiu Stejar

doi:10.1117/12.172086

4 April 1994 3D images used in the localization of the defects in semiconductor devices

George A. Stanciu, Catalin Miu, Sergiu Stejar

Proceedings Volume 2184, Three-Dimensional Microscopy: Image Acquisition and Processing; (1994) https://doi.org/10.1117/12.172086
Event: IS&T/SPIE 1994 International Symposium on Electronic Imaging: Science and Technology, 1994, San Jose, CA, United States

Abstract

Scanning optical microscopy computer assisted has the advantages that a wide range of imaging modes is possible. We have constructed a new computer assisted laser scanning which offers the possibility to obtain 2D and 3D images. The paper presents the principal hardware and software characteristics of the scanner.

Citation Download Citation

George A. Stanciu, Catalin Miu, and Sergiu Stejar "3D images used in the localization of the defects in semiconductor devices", Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); https://doi.org/10.1117/12.172086

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