4 April 1994 3D images used in the localization of the defects in semiconductor devices
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Abstract
Scanning optical microscopy computer assisted has the advantages that a wide range of imaging modes is possible. We have constructed a new computer assisted laser scanning which offers the possibility to obtain 2D and 3D images. The paper presents the principal hardware and software characteristics of the scanner.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George A. Stanciu, Catalin Miu, Sergiu Stejar, "3D images used in the localization of the defects in semiconductor devices", Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); doi: 10.1117/12.172086; https://doi.org/10.1117/12.172086
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KEYWORDS
Photodiodes

3D image processing

Semiconductors

3D scanning

Laser scanners

Microscopy

Microcontrollers

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