4 April 1994 3D images used in the localization of the defects in semiconductor devices
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Abstract
Scanning optical microscopy computer assisted has the advantages that a wide range of imaging modes is possible. We have constructed a new computer assisted laser scanning which offers the possibility to obtain 2D and 3D images. The paper presents the principal hardware and software characteristics of the scanner.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George A. Stanciu, George A. Stanciu, Catalin Miu, Catalin Miu, Sergiu Stejar, Sergiu Stejar, } "3D images used in the localization of the defects in semiconductor devices", Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); doi: 10.1117/12.172086; https://doi.org/10.1117/12.172086
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