Abstract
The confocal imaging of thin film structures is investigated. A theoretical treatment of imaging of stratified media with continuously varying refractive index is presented, and the inverse problem of reconstructing the refractive index profile from a confocal image discussed.
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Colin J. R. Sheppard, Colin J. R. Sheppard, T. J. Connolly, T. J. Connolly, "Confocal imaging of thin films", Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); doi: 10.1117/12.172083; https://doi.org/10.1117/12.172083
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