4 April 1994 Photogrammetric determination of topography of microstructures by scanning electron microscope
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Abstract
This paper presents a new, non-destructive technique for high resolution 3D measurements of microstructures based on digital photogrammetry.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andreas Gleichmann, Johann Michael Koehler, Matthias Hemmleb, Joerg Albertz, "Photogrammetric determination of topography of microstructures by scanning electron microscope", Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); doi: 10.1117/12.172100; https://doi.org/10.1117/12.172100
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