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1 May 1994 Sol-gel and microwave processing of PZT materials for sensor and actuator applications
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Abstract
In this work, the preparation of PZT materials used for the fabrication of smart sensors and actuators is closely investigated. The sol-gel method is used for the processing of the PZT powder because of its potential for making fine, pure and homogeneous powders. Sol-gel is a chemical method that has the possibility of synthesizing a reproducible material. Microwave energy is used for the calcining of this powder and the sintering of the PZT samples. Its use for calcination has the advantage of reducing the total processing time and the soak temperature. In addition, the combination of sol-gel and microwave processing leads to smaller particles and a more uniform distribution of their sizes. Microwave sintering of sol-gel prepared PZT has been accomplished successfully and has been shown to yield improved microstructure and good properties.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zoubeida Ounaies, Vijay K. Varadan, and Vasundara V. Varadan "Sol-gel and microwave processing of PZT materials for sensor and actuator applications", Proc. SPIE 2189, Smart Structures and Materials 1994: Smart Materials, (1 May 1994); https://doi.org/10.1117/12.174078
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