6 May 1994 Nearly time-optimal feedback control of a magnetically levitated photolithography positioning system
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Abstract
This paper focuses on the development of an approximate time- optimal feedback strategy for conducting rest-to-rest maneuvers of a magnetically levitated table. Classical switching curves are modified to account for the complexities of magnetic actuation as well as the coupling of the rigid body modes through the control. A smooth blend of time-optimal and proportional-derivative controls is realized near the destination point to correct for inaccuracies produced by the approximate time-optimal strategy. Detailed computer simulations of the system indicate that this hybrid control strategy provides a significant reduction in settling time as compared to proportional-derivative control alone.
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James M. Redmond, James M. Redmond, } "Nearly time-optimal feedback control of a magnetically levitated photolithography positioning system", Proc. SPIE 2190, Smart Structures and Materials 1994: Smart Structures and Intelligent Systems, (6 May 1994); doi: 10.1117/12.175194; https://doi.org/10.1117/12.175194
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