Dissolution inhibition of phenolic polymers: does a simple percolation field scaling law suffice?

Peter Trefonas III; Gerald Vizvary; Jonathan C. Root; Catherine C. Meister; Charles R. Szmanda

doi:10.1117/12.175384

16 May 1994 Dissolution inhibition of phenolic polymers: does a simple percolation field scaling law suffice?

Peter Trefonas III, Gerald Vizvary, Jonathan C. Root, Catherine C. Meister, Charles R. Szmanda

Proceedings Volume 2195, Advances in Resist Technology and Processing XI; (1994) https://doi.org/10.1117/12.175384
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

The universality of a single percolation field scaling law to the tetramethylammonium hydroxide dissolution of derivatized novolac and poly(4-vinylphenol) polymers was investigated. According to this hypothesis, the dissolution of phenolic polymers occurs through a percolative mechanism resulting from the diffusion of base along nascent channels formed by the spatial proximity of phenolic hydroxyl groups (presumably diffusion of the cation is rate limiting). Dissolution inhibition results from the removal of sites from the percolation field. In this study, the polymers were derivatized with increasing amounts of either 2,1,5- diazonaphthoquinone groups or methylsulphonyl ester groups and the dissolution rates of the films were measured. While our experimental data supported adherence to the percolation law (p equals the scaled amount of free hydroxyl sites remaining on the polymer), Rate equals Rate₀ (p-p_c)^t, we did not find that a single exponent of t equals 2 universally described the dissolution behavior. Rather, our data indicated that t varied with different systems, with values of t greater than 5 being observed. These results are explained in terms of multiple simultaneously operant mechanisms of dissolution creating an environment where multiple percolation can occur. The relative shielding effects of the blocking groups are also compared.

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Peter Trefonas III, Gerald Vizvary, Jonathan C. Root, Catherine C. Meister, and Charles R. Szmanda "Dissolution inhibition of phenolic polymers: does a simple percolation field scaling law suffice?", Proc. SPIE 2195, Advances in Resist Technology and Processing XI, (16 May 1994); https://doi.org/10.1117/12.175384

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KEYWORDS

Polymers

Diffusion

Chemistry

Picture Archiving and Communication System

Semiconducting wafers

Data acquisition

Information operations

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