16 May 1994 Rearrangement of novolak resins
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Abstract
During the course of investigations into the synthesis of novolak resins for use in the microelectronics industry we have observed the rearrangement of the resin. Deeper investigation of this phenomenon has shown it to be a chain scission which leads to a rearrangement of the novolak structure. A possible mechanism is discussed.
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M. Dalil Rahman, M. Dalil Rahman, Ralph R. Dammel, Ralph R. Dammel, Dana L. Durham, Dana L. Durham, } "Rearrangement of novolak resins", Proc. SPIE 2195, Advances in Resist Technology and Processing XI, (16 May 1994); doi: 10.1117/12.175382; https://doi.org/10.1117/12.175382
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