1 May 1994 CD-SEM metrology using BSE detection
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The characteristics of BSE emission at low beam energies (0.5 to 5 kV) are discussed with reference to signal intensity, topographic contrast, material contrast, charging phenomena, and metrology issues. Experimental results are presented for a back-scattered electron (BSE) detector that has been developed for viewing deep trenches and high-aspect contact holes in the CD-SEM metrology applications.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alon Litman, Alon Litman, Asher Pearl, Asher Pearl, Steven R. Rogers, Steven R. Rogers, } "CD-SEM metrology using BSE detection", Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); doi: 10.1117/12.174121; https://doi.org/10.1117/12.174121

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