ISO 9000: What every microlithographer should know

Harry J. Levinson

doi:10.1117/12.174151

1 May 1994 ISO 9000: What every microlithographer should know

Harry J. Levinson

Proceedings Volume 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII; (1994) https://doi.org/10.1117/12.174151
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

This paper begins with an overview of the ISO 9000 quality standards, and then discusses certain topics that are of particular significance for the microelectronics industry.

Citation Download Citation

Harry J. Levinson "ISO 9000: What every microlithographer should know", Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); https://doi.org/10.1117/12.174151

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