New submicron dimension reference for electron-beam metrology system

Yoshinori Nakayama; Kouji Toyoda

doi:10.1117/12.174166

1 May 1994 New submicron dimension reference for electron-beam metrology system

Yoshinori Nakayama, Kouji Toyoda

Proceedings Volume 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII; (1994) https://doi.org/10.1117/12.174166
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

A novel submicron dimension reference for calibrating electron-beam metrology systems has been developed. A fine rectangular-profile diffraction grating fabricated by laser interferometer lithography and anisotropic chemical etching of (110) crystalline silicon satisfies any conditions for submicron dimension reference. In this reference, pitch size of about 0.2 micrometers is easily obtained by laser interferometer lithography with an accuracy, shown by optical diffraction measurement, of within 1 nm. This reference also satisfies several requirements for electron-beam metrology systems. It is stable and free from build-up of charge under electron-beam irradiation because it is fabricated from a conductive silicon single crystal. Also it generates high-contrast secondary electron signals due to high-aspect ratio grating profile. Evaluation of this reference by optical diffraction measurement and electron- beam CD measurements show high performance for submicron dimension calibration. In electron-beam CD measurements, the deviation of repeated measurements is under 5 nm within 3 (sigma) .

Citation Download Citation

Yoshinori Nakayama and Kouji Toyoda "New submicron dimension reference for electron-beam metrology system", Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); https://doi.org/10.1117/12.174166

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available