17 May 1994 1:1 catadioptric deep-UV optics with a full-circle available field
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Abstract
Several kinds of 1:1 catadioptric optical systems with a circle field and an obscuration aperture are described in this paper. Their available working field is a full circle which is at least twice as large as that of the previous 1:1 catadioptric optical systems.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yudong Zhang, Yudong Zhang, } "1:1 catadioptric deep-UV optics with a full-circle available field", Proc. SPIE 2197, Optical/Laser Microlithography VII, (17 May 1994); doi: 10.1117/12.175481; https://doi.org/10.1117/12.175481
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