Effective light source optimization with the modified beam for depth-of-focus enhancements

Tohru Ogawa; Masaya Uematsu; Toshiyuki Ishimaru; Mitsumori Kimura; Toshiro Tsumori

doi:10.1117/12.175425

17 May 1994 Effective light source optimization with the modified beam for depth-of-focus enhancements

Tohru Ogawa, Masaya Uematsu, Toshiyuki Ishimaru, Mitsumori Kimura, Toshiro Tsumori

Proceedings Volume 2197, Optical/Laser Microlithography VII; (1994) https://doi.org/10.1117/12.175425
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

A new exposure method for the depth of focus enhancements without using the off axis filter has been developed. It makes KrF excimer laser (248 nm) lithography to a robust mass production tool beyond 2nd generation of 64 MDRAM class devices. With this new exposure method, the depth of focus for 0.35 micrometers geometries, which includes the vertical and the oblique direction images, can be enlarged more than 45%. The common depth of focus between the line images and the space images cannot be obtained with the quadrupole and the ring illumination methods for the actual sub-0.30 micrometers rule devices. Even for these devices, over 1.1 micrometers depth of focus can be achieved with this newly developed exposure method.

Citation Download Citation

Tohru Ogawa, Masaya Uematsu, Toshiyuki Ishimaru, Mitsumori Kimura, and Toshiro Tsumori "Effective light source optimization with the modified beam for depth-of-focus enhancements", Proc. SPIE 2197, Optical/Laser Microlithography VII, (17 May 1994); https://doi.org/10.1117/12.175425

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available