Focusing and leveling system using position-sensitive detectors for the wafer steppers

Dohoon Kim; Won-Ick Jang; Boo-Yeon Choi; Youngjik I. Lee; Jong-Hyun Lee; Hyung Joun Yoo; S. W. Kang; Jin Hyuk Kwon

doi:10.1117/12.175492

17 May 1994 Focusing and leveling system using position-sensitive detectors for the wafer steppers

Dohoon Kim, Won-Ick Jang, Boo-Yeon Choi, Youngjik I. Lee, Jong-Hyun Lee, Hyung Joun Yoo, S. W. Kang, Jin Hyuk Kwon

Author Affiliations +

Proceedings Volume 2197, Optical/Laser Microlithography VII; (1994) https://doi.org/10.1117/12.175492
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

An optical focus and leveling system for ETRI KrF excimer laser stepper is developed using position sensitive detectors (PSD) and optical magnification method. This type of detection method showed focusing and leveling accuracies of about +/- 0.1 micrometers and +/- 1.0 arcsec (+/- 0.5 X 10^-5 rad) respectively. Also, we confirmed experimentally the autofocus system has +/- 0.15 micrometers signal stability within the controlled temperature range of +/- 0.1 degree(s)C. In this paper, we report the design concepts of the focusing and leveling system and the characteristics of the system parameter applied to ETRI KrF excimer laser stepper.

Citation Download Citation

Dohoon Kim, Dohoon Kim, Won-Ick Jang, Won-Ick Jang, Boo-Yeon Choi, Boo-Yeon Choi, Youngjik I. Lee, Youngjik I. Lee, Jong-Hyun Lee, Jong-Hyun Lee, Hyung Joun Yoo, Hyung Joun Yoo, S. W. Kang, S. W. Kang, Jin Hyuk Kwon, Jin Hyuk Kwon, "Focusing and leveling system using position-sensitive detectors for the wafer steppers", Proc. SPIE 2197, Optical/Laser Microlithography VII, (17 May 1994); doi: 10.1117/12.175492; https://doi.org/10.1117/12.175492

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years