17 May 1994 Recent advances of a KrF excimer laser on a plant's practical requirements
Author Affiliations +
In this paper we describe the performance of the newest model of line-narrowed KrF excimer laser KLES-G6 (1995 model) developed in factory on the practical requirements. The KLES- G6 exhibits: (1) spectral bandwidth < 0.8 pm; (2) wavelength stability < +/- 0.1 pm; (3) pulse-to-pulse energy stability < 1.8% ((sigma) ); (4) output power equals 6 W at 600 Hz; (5) gas life > 100 million pulses or 7 days; (6) window cleaning or exchange > 1 billion pulses; (7) laser chamber exchange > 2 billion pulses; (8) mean time between failures > 1500 hours; (9) running cost per a billion pulses is about 29 thousand dollars. These advanced performances will save the running cost and guarantee the high uptime ratio needed to satisfy the plant's practical requirements.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yukio Kobayashi, Takanobu Ishihara, Hiroaki Nakarai, Noritoshi Ito, Tomokazu Takahashi, Osamu Wakabayashi, Hakaru Mizoguchi, Yoshiho Amada, Junichi Fujimoto, Masahiko Kowaka, Yasuhiro Nozue, "Recent advances of a KrF excimer laser on a plant's practical requirements", Proc. SPIE 2197, Optical/Laser Microlithography VII, (17 May 1994); doi: 10.1117/12.175482; https://doi.org/10.1117/12.175482

Back to Top