17 May 1994 Recent advances of a KrF excimer laser on a plant's practical requirements
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Abstract
In this paper we describe the performance of the newest model of line-narrowed KrF excimer laser KLES-G6 (1995 model) developed in factory on the practical requirements. The KLES- G6 exhibits: (1) spectral bandwidth < 0.8 pm; (2) wavelength stability < +/- 0.1 pm; (3) pulse-to-pulse energy stability < 1.8% ((sigma) ); (4) output power equals 6 W at 600 Hz; (5) gas life > 100 million pulses or 7 days; (6) window cleaning or exchange > 1 billion pulses; (7) laser chamber exchange > 2 billion pulses; (8) mean time between failures > 1500 hours; (9) running cost per a billion pulses is about 29 thousand dollars. These advanced performances will save the running cost and guarantee the high uptime ratio needed to satisfy the plant's practical requirements.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yukio Kobayashi, Yukio Kobayashi, Takanobu Ishihara, Takanobu Ishihara, Hiroaki Nakarai, Hiroaki Nakarai, Noritoshi Ito, Noritoshi Ito, Tomokazu Takahashi, Tomokazu Takahashi, Osamu Wakabayashi, Osamu Wakabayashi, Hakaru Mizoguchi, Hakaru Mizoguchi, Yoshiho Amada, Yoshiho Amada, Junichi Fujimoto, Junichi Fujimoto, Masahiko Kowaka, Masahiko Kowaka, Yasuhiro Nozue, Yasuhiro Nozue, } "Recent advances of a KrF excimer laser on a plant's practical requirements", Proc. SPIE 2197, Optical/Laser Microlithography VII, (17 May 1994); doi: 10.1117/12.175482; https://doi.org/10.1117/12.175482
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