9 June 1994 Metrology for spatial interferometry
Author Affiliations +
Abstract
The accuracy of the relative metrology gauge developed for the proposed OSI and SONATA missions is improved to subpicometer level. An accuracy of 0.15 picometers is obtained in vacuum at time scales of a few minutes. A surface metrology gauge with an initial accuracy of (lambda) /1000 is under construction. Photometry accurate to better than 1 part in 103 for the surface metrology gauge is demonstrated using a commercial grade, 8-bit, uncooled CCD camera and a commercial grade frame grabber at time scales of 10 seconds with a resolution of 320 by 240 pixels.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yekta Gursel, "Metrology for spatial interferometry", Proc. SPIE 2200, Amplitude and Intensity Spatial Interferometry II, (9 June 1994); doi: 10.1117/12.177268; https://doi.org/10.1117/12.177268
PROCEEDINGS
8 PAGES


SHARE
KEYWORDS
Metrology

Interferometers

Frame grabbers

CCD cameras

Interferometry

Optical benches

Photometry

Back to Top