1 March 1995 Examination of the resolution of displacement measurements by the triangulation method applying position-sensitive detectors (PSD)
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Abstract
The triangulation method of range and displacement measurements using position sensitive detectors (PSD) is discussed in this paper. The laboratory model of laser triangulation range and displacement sensor built in the Institute of Optoelectronics has been examined and compared with theoretical predictions. The range and resolution of measurements of this sensor dependent on geometrical parameters of the sensor head can be varied in this model. The resolution of 0.5 micrometers of displacement measurement was achieved experimentally in laboratory conditions. The influence of light and electrical noises on linearity and resolution of measurements is discussed.
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Jan Karol Jabczynski and Jacek Janucki "Examination of the resolution of displacement measurements by the triangulation method applying position-sensitive detectors (PSD)", Proc. SPIE 2202, Laser Technology IV: Research Trends, Instrumentation, and Applications in Metrology and Materials Processing, (1 March 1995); doi: 10.1117/12.203314; https://doi.org/10.1117/12.203314
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