1 March 1995 LMM-1 laser microanalyzer of materials
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Abstract
The LMM-1 laser microanalyzer realizes for the first time a patented device which permits a quantitative analysis of the composition of both metals and materials of the non-metal group, including thin metal and dielectric coatings (from 0.2 to 2 micrometers). This analyzer has the following main parameters: analyzed elements, from Li (No. 3) to U (No. 92); dynamic range of concentration measurements (depending on the number of analyzed elements), (10-3 - 10-2) to 100%; maximum concentration measurement error, 1%; measurement time, 1 min. The LMM-1 microanalyzer has been created with the aim of developing an automated microanalyzer on the basis of the latest achievements of laser engineering and metrology, spectral and computing engineering, as well as systems software in the form of a single bank of spectrochemical parameters of materials and substances to ensure new qualities of the majority of materials, especially of semiconducting materials and crystals, to meet the demands of microelectronics and other allied branches of the industry.
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Andrei Fedorovich Kotyuk, Andrei Fedorovich Kotyuk, Michael Vladimirov Ulanovsky, Michael Vladimirov Ulanovsky, Valerii Ivanovich Arbekov, Valerii Ivanovich Arbekov, } "LMM-1 laser microanalyzer of materials", Proc. SPIE 2202, Laser Technology IV: Research Trends, Instrumentation, and Applications in Metrology and Materials Processing, (1 March 1995); doi: 10.1117/12.203322; https://doi.org/10.1117/12.203322
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