16 August 1994 Advanced laser driver for soft x-ray projection lithography
Author Affiliations +
Proceedings Volume 2206, High-Power Gas and Solid State Lasers; (1994) https://doi.org/10.1117/12.184615
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria
A diode-pumped Nd:YAG laser for use as a driver for a soft x-ray projection lithography system is described. The laser will output 0.5 to 1 J per pulse with about 5 ns pulse width at up to 1.5 kHz repetition frequency. The design employs microchannel-cooled diode laser arrays for optical pumping, zigzag slab energy storage, and a single frequency oscillator injected regenerative amplifier cavity using phase conjugator beam correction for near diffraction limited beam quality. The design and initial results of this laser's activation experiments are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Luis E. Zapata, Luis E. Zapata, Raymond J. Beach, Raymond J. Beach, C. Brent Dane, C. Brent Dane, Patrick Reichert, Patrick Reichert, John N. Honig, John N. Honig, Lloyd A. Hackel, Lloyd A. Hackel, } "Advanced laser driver for soft x-ray projection lithography", Proc. SPIE 2206, High-Power Gas and Solid State Lasers, (16 August 1994); doi: 10.1117/12.184615; https://doi.org/10.1117/12.184615

Back to Top