Automated control of industrial-scale excimer lasers

Allan D. Boardman; Elizabeth M. Hodgson; M. B. Richardson; A. J. Spence; A. C. Wilson

doi:10.1117/12.184631

16 August 1994 Automated control of industrial-scale excimer lasers

Allan D. Boardman, Elizabeth M. Hodgson, M. B. Richardson, A. J. Spence, A. C. Wilson

Proceedings Volume 2206, High-Power Gas and Solid State Lasers; (1994) https://doi.org/10.1117/12.184631
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria

Abstract

This paper describes the design, development, and construction of an automated control system for high average power excimer lasers working in an industrial environment. The control system is based on a distributed network of transputers, each dealing with its own area of responsibility. This modular approach was chosen to provide maximum flexibility, allowing the control system to be optimized for particular lasers or special requirements. The development of monitoring and actuating equipment suitable for the unusual demands of an excimer laser is also an essential part of the overall project. Some of the monitoring equipment used is standard, while some has been designed and built at Salford. In particular, a 100 MHz bandwidth optical fiber current sensor has been developed to measure the discharge current. Communications between the sensors and the transputer network are almost entirely optical, with special circuits designed at Salford to convert standard sensor outputs into optical signals. Several different systems are used, according to the response time required.

Citation Download Citation

Allan D. Boardman, Elizabeth M. Hodgson, M. B. Richardson, A. J. Spence, and A. C. Wilson "Automated control of industrial-scale excimer lasers", Proc. SPIE 2206, High-Power Gas and Solid State Lasers, (16 August 1994); https://doi.org/10.1117/12.184631

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