16 August 1994 Gas lifetime restriction in ArF and KrF avalanche discharge lasers
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Proceedings Volume 2206, High-Power Gas and Solid State Lasers; (1994); doi: 10.1117/12.184600
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria
Abstract
The results of gas lifetime experiments in ArF and KrF avalanche discharge lasers utilizing different laser chamber materials are presented. Utilization of aluminum ceramics protecting laser chamber polymeric walls from UV gas discharge radiation give us the possibility to increase significantly gas lifetime. Two different physical mechanisms restricting gas lifetime were considered. The first one is connected with interaction between fluoride and organic molecules. The second one (unremovable in avalanche discharge lasers) is connected with electrode erosion processes. The numerical evaluations of the gas lifetime limitation value in ArF and KrF lasers are presented. The different ways of further increasing gas lifetime are discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Evgenyi A. Petrukhin, Serge K. Vartapetov, "Gas lifetime restriction in ArF and KrF avalanche discharge lasers", Proc. SPIE 2206, High-Power Gas and Solid State Lasers, (16 August 1994); doi: 10.1117/12.184600; https://doi.org/10.1117/12.184600
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KEYWORDS
Ceramics

Optical filters

Cryogenics

Gas lasers

Ultraviolet radiation

Electrodes

Polymers

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