The use of high power CO2 lasers for various applications in material and production technologies has increasingly grown, and new applications are on their way to being used in industry. Due to varying beam path lengths, proper beam delivery is essential to obtain constant working conditions when using machines with moving beam guidance. The focussing characteristics of divergent laser beams change with the distance between laser source and processing head. To keep the energy distribution on the workpiece surface on the same level while working with flying optics, the use of deformable mirror systems has proven to be a suitable solution. In this case, a newly-developed system is brought into the beam guidance system to keep the focal spot diameter constant. As far as applications are concerned, where the distance of the focal spot to the surface of the workpiece is of major interest for the performance of the process, these optical devices are also used to tune the focal length. For example collision danger or dynamic limitations of the handling system may mean that the focal spot has to follow the surface outline without keeping the distance between processing head and material surface constant. Besides cutting and shaping by material removal applications, welding is a kind of application where a focus shift without moving the processing head may be advantageous, especially for 3D processes. Therefore, another deformable mirror is installed near to the focusing optics. Investigations have been carried out on the location of the deformable mirror close to the laser source (RS 3000 RF), and inside the processing head.