7 September 1994 Laser synthesis of Si-Mo-C-O polymer for membrane modification
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Proceedings Volume 2207, Laser Materials Processing: Industrial and Microelectronics Applications; (1994) https://doi.org/10.1117/12.184785
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria
Abstract
The interaction of CO2 laser radiation with mixtures of silane and molybdenum hexacarbonyl (vapor) results in solid Si/C/O/Mo material and various gaseous compounds (mainly CO). The XPS, SEM and IR spectral analysis of the deposit pointed out an organosilicon polymer structure, with a composition that is strongly affected by SiH4 partial concentration. Possible routes involved in the SiH4-photosensitized decomposition of Mo(CO)6 are discussed. The laser technique can serve as an efficient method for creating metal-modified organosilicon polymers for membrane modification.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rodica Alexandrescu, Dan C. Dumitras, Ion G. Morjan, Letitia Voicu, "Laser synthesis of Si-Mo-C-O polymer for membrane modification", Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); doi: 10.1117/12.184785; https://doi.org/10.1117/12.184785
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