7 September 1994 Laser synthesis of Si-Mo-C-O polymer for membrane modification
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Proceedings Volume 2207, Laser Materials Processing: Industrial and Microelectronics Applications; (1994) https://doi.org/10.1117/12.184785
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria
Abstract
The interaction of CO2 laser radiation with mixtures of silane and molybdenum hexacarbonyl (vapor) results in solid Si/C/O/Mo material and various gaseous compounds (mainly CO). The XPS, SEM and IR spectral analysis of the deposit pointed out an organosilicon polymer structure, with a composition that is strongly affected by SiH4 partial concentration. Possible routes involved in the SiH4-photosensitized decomposition of Mo(CO)6 are discussed. The laser technique can serve as an efficient method for creating metal-modified organosilicon polymers for membrane modification.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rodica Alexandrescu, Rodica Alexandrescu, Dan C. Dumitras, Dan C. Dumitras, Ion G. Morjan, Ion G. Morjan, Letitia Voicu, Letitia Voicu, } "Laser synthesis of Si-Mo-C-O polymer for membrane modification", Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); doi: 10.1117/12.184785; https://doi.org/10.1117/12.184785
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