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13 September 1994 Selection of materials for soft x-ray (SXR) and extreme ultraviolet (EUV) filters for space astronomy and other applications
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Abstract
This paper briefly reviews the more traditional materials that have been used for Soft X-Ray (SXR) and Extreme Ultraviolet (EUV) filters and then discusses several applications where new multilayer combinations of materials are being employed. The new applications include projection lithography and the detection of Energetic Neutral Atom (ENA) populations from spacecraft. Also briefly discussed is the use of polyimides for spacecraft filters.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Forbes R. Powell, Virginia Ann Drake, Bill R. Sandel, and Donald G. Mitchell "Selection of materials for soft x-ray (SXR) and extreme ultraviolet (EUV) filters for space astronomy and other applications", Proc. SPIE 2209, Space Optics 1994: Earth Observation and Astronomy, (13 September 1994); https://doi.org/10.1117/12.185281
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