30 September 1994 Fully automated angle resolved scatterometer
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Abstract
The ARS-scatterometer at the IOF Jena which has been designed and built in cooperation with the Carl Zeiss JENA GmbH is capable of performing accurate measurements of the BRDF over a range of approximately eleven orders of magnitude (from 105 to 10-6 sr-1) in BRDF. These measurements can be carried out for surfaces made of any dielectric, metallic or semiconductor material. A He-Ne-laser is used in conjunction with a mirror beam focusing optics. The eight motorized degrees of freedom of the instruments are computer controlled and interfaced to the user by a sophisticated software running under MicroSoft Windows. It is shown, that the scatterometer is sensitive to a rms-roughness better than 1 nm.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jakob Neubert, Thomas Seifert, Norbert Czarnetzki, and Thomas Weigel "Fully automated angle resolved scatterometer", Proc. SPIE 2210, Space Optics 1994: Space Instrumentation and Spacecraft Optics, (30 September 1994); doi: 10.1117/12.188112; https://doi.org/10.1117/12.188112
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