28 July 1994 Integrated optic device modeling
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Abstract
The modern production of integrated optic devices (IOD) is impossible without integration of all its components into a unified system ranging from the coordination of device parameters to their sales. The integration of artificial intelligence methods, microtechnologies and modern communications helps create IODs of quite a new quality. Such systems are being developed and used in the production of electronic devices. They can be the basis for the development of automated systems in the IOD production. These automated technologies use a unified production cycle model system.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lyudmila I. Konopaltseva, Lyudmila I. Konopaltseva, Mikhael M. Semerenko, Mikhael M. Semerenko, } "Integrated optic device modeling", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); doi: 10.1117/12.180978; https://doi.org/10.1117/12.180978
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