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28 July 1994 Laser writing of optical waveguides in sol-gel films
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Abstract
Laser heating can be used to fully densify selected areas of a partially densified sol-gel film deposited onto a glass substrate, thus substituting the conventional heat treatment in an oven. Here the topographic and optical characteristics of strip waveguides produced in a SiO2-TiO2 film by direct writing with a focused CO2 laser are presented, and the critical parameters of the process discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stefano Pelli, Giancarlo C. Righini, Alessandro Verciani, Massimo Guglielmi, Alessandro Martucci, and Antonio Scaglione "Laser writing of optical waveguides in sol-gel films", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); https://doi.org/10.1117/12.180983
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