13 July 1994 Electrostatically suspended and sensed micromechanical rate gyroscope
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Abstract
Currently under development at SatCon Technology Co. is a proof of principle, angular rate sensing gyroscope which operates with a closed loop, electrostatic suspension. The prototype design will utilize an ohmically isolated rotor disc driven by multi-phase radial torque actuation. The rotor will be suspended radially and axially by fields produced from appropriately placed electrode elements. Angular rate will be detected as rebalanced rotor tilt. The inclusion of shared function electrodes for the sensors and actuators will minimize VLSI micro-machining complexity. To reduce stray capacitance, sensor FET guard driver circuitry will be placed close to the VLSI structure by means of hybridized construction. Operation of key subsystems such as rebalance/rotation sensors and the electrostatic actuators will be evaluated before the prototype geometry is fixed with the aid of limited function micromachined structures. A set of these preliminary structures has recently been received after fabrication at MCNC. The structures have been examined and appear to fit our geometric and electrical specifications. Testing with electronics is underway. Results of these evaluations and the updated prototype structure designs are discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard P. Torti, Richard P. Torti, Vijay Gondhalekar, Vijay Gondhalekar, Hieu Tran, Hieu Tran, B. Selfors, B. Selfors, S. Bart, S. Bart, B. Maxwell, B. Maxwell, } "Electrostatically suspended and sensed micromechanical rate gyroscope", Proc. SPIE 2220, Sensing, Imaging, and Vision for Control and Guidance of Aerospace Vehicles, (13 July 1994); doi: 10.1117/12.179613; https://doi.org/10.1117/12.179613
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