15 July 1994 Design and fabrication of thin film monolithic uncooled infrared detector arrays
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Abstract
This paper discusses the design of monolithic thin film thermal detectors, with particular reference to the parameters which influence performance such as thermal conductance. Methods for implementing thermal isolation are described, and critical fabrication technology is outlined. Optional materials technology for thin film resistance bolometers is reviewed, and consideration is given to bias and signal conditioning techniques.
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Kevin Charles Liddiard, Kevin Charles Liddiard, Mark H. Unewisse, Mark H. Unewisse, Olaf Reinhold, Olaf Reinhold, "Design and fabrication of thin film monolithic uncooled infrared detector arrays", Proc. SPIE 2225, Infrared Detectors and Focal Plane Arrays III, (15 July 1994); doi: 10.1117/12.179725; https://doi.org/10.1117/12.179725
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